Title :
Local degradation of conductive microstructures of integrated chips at the effect of powerful pulsing electromagnetic fields
Author :
Starostenko, V.V. ; Taran, Ye.P. ; Tereshenko, V.Yu.
Author_Institution :
Tavrical Nat. Univ., Simferopol, Ukraine
Abstract :
The processes of local degradation of conductive microstructures of integrated chips are surveyed for the effect of powerful electromagnetic fields. The time of development of nonreversible degradation processes is identified and the geometrical size of local sites of metal film burn-up is detected.
Keywords :
electromagnetic pulse; integrated circuit metallisation; integrated circuit modelling; integrated circuit reliability; thermal analysis; IC local degradation; conductive microstructures; dynamic electrothermal model; integrated chips; metal film burn-up; metallic films; nonuniform metal-dielectric microstructures; powerful electromagnetic fields; powerful pulsed EM fields; reliable operation;
Conference_Titel :
Microwave and Telecommunication Technology, 2001. CriMiCo 2001. 11th International Conference on
Conference_Location :
Sevastopol, Crimea, Ukraine
Print_ISBN :
966-7968-00-6
