Title :
Investigation of spatial homogeneity of microwave discharge plasma by means of optical emission spectroscopy method
Author :
Bordusov, S.V. ; Dostanko, A.P. ; Spiridonov, S.V.
Author_Institution :
Belorussian State Univ. of Informatics & Radioelectronics, Minsk, Belarus
Abstract :
The actual spatial distribution of the luminescence intensity of a microwave discharge in oxygen at different distances from the microwave energy input band was studied with the method of optical emission spectroscopy. The examinations were carried out in a plasma generator on the basis of a ring waveguide slot antenna.
Keywords :
high-frequency discharges; luminescence; microwave measurement; oxygen; plasma production; plasma properties; plasma radiofrequency heating; slot antennas; O/sub 2/; luminescence; luminescence intensity spatial distribution; microwave discharge plasma; microwave energy input band; optical emission spectroscopy; oxygen microwave discharge; plasma generator; ring waveguide slot antenna; spatial homogeneity;
Conference_Titel :
Microwave and Telecommunication Technology, 2001. CriMiCo 2001. 11th International Conference on
Conference_Location :
Sevastopol, Crimea, Ukraine
Print_ISBN :
966-7968-00-6
