DocumentCode
389182
Title
Investigation of spatial homogeneity of microwave discharge plasma by means of optical emission spectroscopy method
Author
Bordusov, S.V. ; Dostanko, A.P. ; Spiridonov, S.V.
Author_Institution
Belorussian State Univ. of Informatics & Radioelectronics, Minsk, Belarus
fYear
2001
fDate
14-14 Sept. 2001
Firstpage
583
Lastpage
585
Abstract
The actual spatial distribution of the luminescence intensity of a microwave discharge in oxygen at different distances from the microwave energy input band was studied with the method of optical emission spectroscopy. The examinations were carried out in a plasma generator on the basis of a ring waveguide slot antenna.
Keywords
high-frequency discharges; luminescence; microwave measurement; oxygen; plasma production; plasma properties; plasma radiofrequency heating; slot antennas; O/sub 2/; luminescence; luminescence intensity spatial distribution; microwave discharge plasma; microwave energy input band; optical emission spectroscopy; oxygen microwave discharge; plasma generator; ring waveguide slot antenna; spatial homogeneity;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave and Telecommunication Technology, 2001. CriMiCo 2001. 11th International Conference on
Conference_Location
Sevastopol, Crimea, Ukraine
Print_ISBN
966-7968-00-6
Type
conf
Filename
1173977
Link To Document