Title :
High pressure valves in MEMS: theory and applications
Author :
Luque, Antonio ; Quero, José M.
Author_Institution :
Dpto. Ingenieria Electronica, Univ. de Sevilla, Spain
Abstract :
In this paper, utility and applications of high pressure microvalves are discussed. In addition, a design of a new high pressure microfluidic valve is presented. Simulation results have proven the valve useful for driving pressures up to 10 atm. Here, a way of building such valve is described, along with the whole fabrication process needed to realize it.
Keywords :
microfluidics; micromechanical devices; valves; MEMS; fabrication process; high pressure microfluidic valve; high pressure microvalves; high pressure valves; Apertures; Buildings; Fabrication; Fluidics; Magnetosphere; Microfluidics; Micromechanical devices; Microvalves; Printing; Valves;
Conference_Titel :
IECON 02 [Industrial Electronics Society, IEEE 2002 28th Annual Conference of the]
Print_ISBN :
0-7803-7474-6
DOI :
10.1109/IECON.2002.1182884
