• DocumentCode
    391084
  • Title

    Preview-based optimal inversion for output tracking: application to scanning tunneling microscopy

  • Author

    Zou, Qingze ; Devasia, Santosh

  • Author_Institution
    Dept. of Mech. Eng., Univ. of Washington, Seattle, WA, USA
  • Volume
    1
  • fYear
    2002
  • fDate
    10-13 Dec. 2002
  • Firstpage
    79
  • Abstract
    Optimal inversion of system dynamics can be used to design inputs that achieve precision output tracking. However, a challenge in implementing the optimal-inversion approach is that the resulting inverse input tends to be noncausal. The noncausality of the optimal inverse input implies that the desired output trajectory must be prespecified, and cannot be changed online. Therefore, the optimal inverse can only be used in trajectory planning applications (where the entire desired output is known in advance). The article shows that the noncausal optimal inverse input can be computed using a preview-based approach. Properties of the optimal inverse are analyzed and the amount of preview time needed is quantified in terms of the required accuracy in output tracking, the poles and zeros of the system, and the cost function used to design the optimal inverse. The proposed approach is applied to precision (nanoscale) positioning of a scanning tunneling microscope (STM). Experimental results are presented to show that finite preview of the desired output-trajectory is sufficient to achieve a substantial increase in the STM´s operating speed.
  • Keywords
    linear systems; nanopositioning; physical instrumentation control; poles and zeros; predictive control; root loci; scanning tunnelling microscopy; transfer function matrices; cost function; nanoscale positioning; noncausal optimal inverse input; output tracking; poles; precision positioning; preview-based optimal inversion; scanning tunneling microscopy; trajectory planning; zeros; Actuators; Bandwidth; Cost function; Frequency; Microscopy; Nanofabrication; Throughput; Trajectory; Tunneling; Uncertainty;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Decision and Control, 2002, Proceedings of the 41st IEEE Conference on
  • ISSN
    0191-2216
  • Print_ISBN
    0-7803-7516-5
  • Type

    conf

  • DOI
    10.1109/CDC.2002.1184471
  • Filename
    1184471