DocumentCode
392504
Title
Active micro heat transport device using thermal pumping system
Author
Yokoyama, Yoshinori ; Takeda, Munehisa ; Umemoto, Toshiyuki ; Ogushi, Tetsurou
Author_Institution
Adv. Technol. R&D Center, Mitsubishi Electr. Corp., Hyogo, Japan
fYear
2003
fDate
19-23 Jan. 2003
Firstpage
108
Lastpage
111
Abstract
We have developed a thermal pumping system for loop-type micro channels, realizing an active micro heat transport device capable of highly efficient cooling. The thermal pumping system makes use of the time change in the vapor pressure of the working fluid as the driving force for fluid circulation. Because it has no mechanically moving elements, it is highly reliable and moreover is effective in preventing deterioration in the heat transport rate due to miniaturization. We set up a system with two thermal pumps within one loop for efficient heat transportation. We fabricated a looped micro-channel, which has a width of 600 μm, a depth of 120 μm and a channel length of 220 mm. We confirmed a flow rate of 12.5 mm/s at the driving frequency of 1 Hz, enabling a heat transport of 0.16 W.
Keywords
heat transfer; microfluidics; 1 Hz; 120 micron; 220 mm; 600 micron; active micro heat transport device; driving force; fluid circulation; loop-type micro channels; looped micro-channel; no mechanically moving elements; thermal pumping system; time change; vapor pressure; working fluid; Cooling; Frequency; Heat pumps; Maintenance; Research and development; Resistance heating; Telephony; Thermal force; Transportation; Valves;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE The Sixteenth Annual International Conference on
ISSN
1084-6999
Print_ISBN
0-7803-7744-3
Type
conf
DOI
10.1109/MEMSYS.2003.1189699
Filename
1189699
Link To Document