MEMS based acoustic FET as active components for integrated functional acoustic systems

This paper presents acoustic transistors working in a similar way to field effect transistors (FETs). We have studied on integrated functional acoustic systems based on MEMS technology aiming at compact systems for noise and sound control. Our previous work mainly dealt with passive acoustic components controlled by MEMS technology. Acoustic transistors as active components are expected to contribute various effects such as amplification to integrated functional acoustic systems. Characteristics of implemented acoustic transistors (hereafter acoustic FETs) using micromachined diaphragm structures will be reported and followed by our research prospects towards integrated functional acoustic systems.