High-Performance Laser Beam Homogenizer Based on Double-Sided Concave Microlens

Author

Zefang Deng ; Qing Yang ; Feng Chen ; Hao Bian ; Jiale Yong ; Guangqing Du ; Yang Hu ; Xun Hou

Author_Institution

State Key Lab. for Manuf. Syst. Eng., Xi´an Jiaotong Univ., Xi´an, China

Volume

26

Issue

20

fYear

2014

fDate

Oct.15, 15 2014

Firstpage

2086

Lastpage

2089

Abstract

Microlens array (MLA) has attracted increasing interest as its application in micro-optical device and system. In this letter, we proposed a new approach that applies rotational displacement MLA to the laser homogenization system. These are nonregular arrays consisting of close-packed concave MLAs on two sides with specific rotation angle. And, the double-sided MLAs diffusers with new design parameter were successfully fabricated using single pulse femtosecond laser assisted chemical wet etching. Simulation and experimental results reveal the good homogenization performance of the double-sided MLAs. In addition, we fabricated diffusers with different rotation angles (θ), and when θ = 60°, the diffuser obtains the best optical performance.

Keywords

laser accessories; laser arrays; laser beam etching; laser beams; microfabrication; microlenses; optical design techniques; optical fabrication; optical rotation; close-packed concave microlens array; design parameter; double-sided concave microlens array; double-sided microlens array diffusers; high-performance laser beam homogenizer; laser homogenization system; nonregular arrays; rotation angle; rotational displacement microlens array; single pulse femtosecond laser assisted chemical wet etching; Arrays; Laser beams; Lenses; Measurement by laser beam; Microoptics; Optical device fabrication; Optimized production technology; Laser machining; laser homogenizer; microlens array;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/LPT.2014.2347331

Filename

6881666