Title :
A metallic glass surface acoustic wave device
Author :
French, L.A., Jr. ; Pollard, T.B. ; Bernhardt, G. ; Call, M. ; Doucette, L.D. ; da Cunha, M.P. ; Lad, R.J. ; Vetelino, J.F.
Author_Institution :
Lab. for Surface Sci. & Technol., Univ. of Maine, Orono, ME, USA
Abstract :
An acoustic wave device that utilizes an isotropic metallic glass substrate called Vitreloy 1 has been designed, fabricated and experimentally tested. Bulk and surface acoustic waves (SAWs) have been excited using electromagnetic acoustic transducers (EMATs) and an aluminum nitride (AlN) film deposited on the glass. Using EMAT excitation, the elastic constants and bulk shear wave velocity were determined. In order to excite SAWs in the metallic glass, piezoelectric AlN films were deposited by RF magnetron sputtering. The transmission response exhibited the characteristics of a SAW resonator although the insertion loss was high at about 40 dB. The resulting SAW velocity was about 2400 m/s.
Keywords :
III-V semiconductors; aluminium compounds; metallic glasses; piezoelectric semiconductors; semiconductor thin films; sputtered coatings; surface acoustic wave transducers; wide band gap semiconductors; 40 dB; AlN; AlN film; RF magnetron sputtering; SAWs; Vitreloy 1; bulk shear wave velocity; elastic constants; electromagnetic transducers; insertion loss; metallic glass surface acoustic wave device; transmission response; Acoustic testing; Acoustic waves; Electromagnetic scattering; Film bulk acoustic resonators; Glass; Piezoelectric films; Sawing machines; Substrates; Surface acoustic wave devices; Surface acoustic waves;
Conference_Titel :
Ultrasonics Symposium, 2002. Proceedings. 2002 IEEE
Print_ISBN :
0-7803-7582-3
DOI :
10.1109/ULTSYM.2002.1193368
