Full impedance approach to modeling electrode effects on SAW propagating under a periodic metal grating

Author

Zhang, Victor Y. ; Lefebvre, J.E. ; Gryba, T.

Author_Institution

Inst. d´´Electronique, de Microelectronique, et de Nanotechnologie, CNRS, Villeneuve d´´Ascq, France

Volume

1

fYear

2002

fDate

8-11 Oct. 2002

Firstpage

347

Abstract

A full impedance approach is proposed for modeling SAW interaction with a periodic metal grating. A surface impedance including both mechanical and electrical effects is derived for the grating. Both substrate and strip materials are allowed to be anisotropic and multilayered. SAW dispersion curves are determined using a frequency dependent harmonic admittance for Al-electrodes on 36-LTO and 128-LNO substrates. Comparison with FEM results is made to demonstrate the validity and limitation of the presented model.

Keywords

acoustic wave propagation; finite element analysis; harmonic analysis; lithium compounds; piezoelectric materials; surface acoustic wave filters; surface acoustic waves; surface impedance; 128-LNO substrates; 36-LTO substrates; Al-electrodes; FEM; LiNbO₃; LiTiO₃; SAW dispersion curves; SAW propagation; electrical effects; frequency dependent harmonic admittance; full impedance approach; mechanical effects; modeling electrode effects; periodic metal grating; Admittance; Anisotropic magnetoresistance; Electrodes; Gratings; Power harmonic filters; Resonator filters; Strips; Surface acoustic waves; Surface impedance; Surface treatment;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 2002. Proceedings. 2002 IEEE

ISSN

1051-0117

Print_ISBN

0-7803-7582-3

Type

conf

DOI

10.1109/ULTSYM.2002.1193417

Filename

1193417