Hydrothermally deposited PZT thin film vibration probe sensor

Author

Sasaki, Misato ; Kanda, Takefumi ; Kurosawa, Minoru Kuribayashi ; Higuchi, Toshiro

Author_Institution

Tokyo Inst. of Technol., Yokohama, Japan

Volume

1

fYear

2002

fDate

8-11 Oct. 2002

Firstpage

449

Abstract

We have fabricated a touch probe sensor using PZT thin film vibrator. This sensor was designed with the aim of realizing high resolution more than 0.5 nm, low contact force under 100 nN, a wide scanning range in mm scale square and quick scanning surface profile measurement. These features have advantages in measuring nano structure, for example sub micron rule VLSI or micro electro mechanical systems (MEMS). The sensitivity and resolution were 2.0×10^-2 mV/nm and 2.4 nm. The sensor device was installed in AFM. Then an image of surface texture was obtained.

Keywords

atomic force microscopy; bending; lead compounds; microsensors; piezoelectric thin films; surface acoustic wave sensors; surface topography measurement; vibration measurement; 0.5 nm; AFM; MEMS; PZT; PbZrO3TiO3; high resolution; hydrothermally deposited PZT thin film vibration probe sensor; low contact force; micro electro mechanical systems; quick scanning surface profile measurement; sub micron rule VLSI; touch probe sensor; wide scanning range; Atomic force microscopy; Force measurement; Force sensors; Mechanical variables measurement; Probes; Sputtering; Tactile sensors; Thin film sensors; Very large scale integration; Vibrations;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 2002. Proceedings. 2002 IEEE

ISSN

1051-0117

Print_ISBN

0-7803-7582-3

Type

conf

DOI

10.1109/ULTSYM.2002.1193439

Filename

1193439