Toward the development of an anhydride hexafluorhydric acid sensor based on surface transverse wave devices

This paper presents theoretical and experimental developments for the implementation of SAW sensors able to detect small concentration of anhydride HF acid in air. Solutions based on the used of Surface Transverse Waves (STW) on Quartz (YXlt)/36°/90° have been analysed to evaluate their potential sensitivity to HF. Devices have been first tested in a BHF solution to identify the kinetics of the reaction. Another set of tests have been then performed under various gaseous conditions to characterise their actual behaviour when submitted to controlled combinations of HF and other well identified chemical compounds.