Stepping motion analysis of surface acoustic wave motor toward nanometer resolution positioning system

Author

Shigematsu, Takashi ; Kuroswa, Minoru Kuribayashi ; Asai, Katsuhiko

Author_Institution

Dept. of Adv. Appl. Electron., Tokyo Inst. of Technol., Yokohama, Japan

Volume

1

fYear

2002

fDate

8-11 Oct. 2002

Firstpage

653

Abstract

A mechanical model of a surface acoustic wave (SAW) motor´s stepping motions ranging under 100 nanometers was constructed. The SAW motor had a compliance structure in its movable part to utilize nanometer vibration of SAW for friction drive. The compliance, however, resulted in the two-degree-of-freedom vibration behavior of the movable part. Based on the mechanical model, the system identification was carried out by means of FFT analyses and decay fittings to experimental data. The simulation with the identified model qualitatively represented the experimental results. For more accurate simulations, additional nonlinear effects should be implied to the model.

Keywords

fast Fourier transforms; machine theory; nanopositioning; stepping motors; surface acoustic wave devices; ultrasonic motors; 100 nm; FFT analyses; SAW motor; compliance; compliance structure; decay fittings; friction drive; mechanical model; nanometer resolution positioning system; nanometer vibration; nonlinear effects; stepping motion analysis; stepping motions; surface acoustic wave motor; Acoustic waves; Micromotors; Motion analysis; Rails; Silicon; Stators; Steel; Surface acoustic waves; System identification; Vibrations;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 2002. Proceedings. 2002 IEEE

ISSN

1051-0117

Print_ISBN

0-7803-7582-3

Type

conf

DOI

10.1109/ULTSYM.2002.1193487

Filename

1193487