Title :
Film air bearings generated by ultrasonic vibrations
Author :
Hladky-Hennion, Anne-Christine ; Granger, Christian ; Haw, Gérard
Author_Institution :
ISEN Dept., IEMN, Lille, France
Abstract :
Film air bearings generated by a piezoelectric bimorph present many advantages in comparison with conventional air bearing systems, because they are autonomous and they take a reduced place. This paper first presents the working principle, then theoretical formulation for the fluid domain. Several prototypes are designed using the ATILA finite element code and are built. The experimental procedure is detailed with a view to measuring the air bearing thickness and its relative variations.
Keywords :
finite element analysis; machine bearings; piezoelectric devices; ultrasonic applications; ATILA finite element code; film air bearings; fluid domain; piezoelectric bimorph; ultrasonic vibrations; Amplitude modulation; Capacitance measurement; Finite element methods; Frequency; Friction; Levitation; Piezoelectric films; Pistons; Prototypes; Thickness measurement;
Conference_Titel :
Ultrasonics Symposium, 2002. Proceedings. 2002 IEEE
Print_ISBN :
0-7803-7582-3
DOI :
10.1109/ULTSYM.2002.1193493
