DocumentCode
393348
Title
Integrated web-based architecture for correlative engineering data analysis and decision support
Author
Tandon, Navin ; Cleverdon, Dana ; Hinshaw, Bill
Author_Institution
Kilby Center (KFAB), Texas Instruments, Dallas, TX, USA
fYear
2003
fDate
31 March-1 April 2003
Firstpage
273
Lastpage
279
Abstract
In the dynamic environment of frequently changing technology cycles, semiconductor manufacturing companies strive to optimize processes quickly to increase yields across a myriad of device types being designed and processed simultaneously in a factory. Immense quantities of process and test data are usually collected during silicon processing, and computerized tools are used to extract and analyze the engineering data for decision support. An integrated web-based architecture using Spotfire DecisionSite™ framework has been implemented at Kilby Center (KFAB) of Texas Instruments (TI) for engineering data analysis. Rather than merely providing access to the different data sets to the end users, the established infrastructure provides an enormous value by facilitating data merges and correlative analyses across the multiple and complex data warehouses. Ease of employing these correlation techniques has lead to improvements in device designs, process corrections, equipment maintenance, and yields.
Keywords
Internet; correlation methods; data analysis; data warehouses; decision support systems; engineering information systems; integrated circuit manufacture; integrated circuit yield; manufacturing data processing; silicon; technical support services; Kilby Center; Si; Si processing; Spotfire DecisionSite framework; computerized tools; correlation techniques; correlative analyses; data merges; data warehouses; decision support; dynamic environment; engineering data analysis; integrated web-based architecture; parametric testing; process data; semiconductor manufacturing; test data; yield enhancement; Data analysis; Data engineering; Data mining; Design optimization; Manufacturing processes; Process design; Production facilities; Semiconductor device manufacture; Silicon; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Semiconductor Manufacturing Conference and Workshop, 2003 IEEEI/SEMI
ISSN
1078-8743
Print_ISBN
0-7803-7681-1
Type
conf
DOI
10.1109/ASMC.2003.1194506
Filename
1194506
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