Title :
Integrated design of structure/control systems in micromachines
Author :
Ando, Hiroki ; Hiramoto, Kazuhiko ; Obinata, Goro
Author_Institution :
Graduate Sch. of Eng., Nagoya Univ., Japan
Abstract :
A design problem of active controlled micromachines has been considered in this paper. Stable two-dimensional vibration of a structure at pm-specified frequencies is sought subject to the vibration amplitude and the actuator capacity requirements. It is shown that the simultaneous optimization both on the mechanical structure and the active controller is quite useful for this kind of design problem.
Keywords :
control engineering; micromechanical devices; optimal control; stability; vibration control; active controlled micromachines; actuator capacity requirements; pm-specified frequencies; simultaneous optimization; stable 2D vibration; stable two-dimensional vibration; structure/control system integrated design; vibration amplitude; Actuators; Control systems; Design engineering; Design optimization; Equations; Fabrication; Mirrors; Open loop systems; Springs; Vibration control;
Conference_Titel :
SICE 2002. Proceedings of the 41st SICE Annual Conference
Print_ISBN :
0-7803-7631-5
DOI :
10.1109/SICE.2002.1195477
