A bandpass sigma-delta modulator employing micro-mechanical resonator

Author

Wang, X. ; Xu, Y.P. ; Wang, Z. ; Liw, S. ; Sun, K.H. ; Tan, L.S.

Author_Institution

Dept. of Electr. & Comput. Eng., Nat. Univ. of Singapore, Singapore

Volume

1

fYear

2003

fDate

25-28 May 2003

Abstract

A new second-order bandpass sigma-delta modulator employing a micro-mechanical resonator is presented. The micro-mechanical resonator is used to replace its electronic counterpart for its high Q value. The design is based on the pulse-invariant transform and multi-feedback technique. A compensation circuit is proposed to cancel the anti-resonance in the micro-mechanical resonator in order to obtain the desired transfer function. The modulator is implemented in a 0.6 μm CMOS process with an external clamped-clamped beam micro-mechanical resonator. Simulations show that a 47 dB dynamic range can be achieved in a 200 kHz bandwidth centered at 8 MHz when sampled at 32 MHz.

Keywords

CMOS integrated circuits; Q-factor; circuit feedback; circuit simulation; compensation; integrated circuit design; micromechanical resonators; sigma-delta modulation; transfer functions; transforms; 0.6 micron; 200 kHz; 32 MHz; 8 MHz; CMOS; antiresonance cancellation circuit; compensation circuit; external clamped beam resonator; high Q factor; micromechanical resonator; modulator dynamic range; multifeedback technique; pulse-invariant transform technique; second-order bandpass sigma-delta modulator; transfer function; CMOS process; CMOS technology; Circuit simulation; Delta-sigma modulation; Electrodes; Equivalent circuits; Frequency; Optical modulation; Silicon; Transfer functions;

fLanguage

English

Publisher

ieee

Conference_Titel

Circuits and Systems, 2003. ISCAS '03. Proceedings of the 2003 International Symposium on

Print_ISBN

0-7803-7761-3

Type

conf

DOI

10.1109/ISCAS.2003.1205745

Filename

1205745