Walking-die : using MEMS and SoC for a miniature robot designed for nanoscale operations

System-on-chip (SoC) design methodology allows a high-level of integration in relatively complex electronic systems while microelectro mechanical systems (MEMS) technology provides the ability to convert electric power to mechanical power with very small dimensions. These two technologies combined provide the opportunity to develop complex miniature robots. This paper introduces the walking-die, an on-chip miniature robot of a few mm² designed for operations at the nanometer scale. Although several components are required to implement such a robot, this papers emphasizes on the custom parts of the systems used to embed most of the digital functions based on SoC technology and the locomotion system implemented using silicon MEMS.