DocumentCode :
397450
Title :
Electrical isolation of ZnO by ion irradiation
Author :
Kucheyev, S.O. ; Jagadish, C. ; Williams, J.S. ; Deenapanray, P.N.K. ; Yano, Mitsuaki ; Koike, Kazuto ; Sasa, Shigehlko ; Inoue, M. ; Ogata, Ken-ichi
Author_Institution :
Lawrence Livemore National Laboratory
fYear :
2002
fDate :
30 June-5 July 2002
Firstpage :
143
Lastpage :
146
Keywords :
Biological materials; Chemicals; Fabrication; Implants; Isolation technology; Rapid thermal annealing; Resistors; Temperature; Thermal stability; Zinc oxide;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Semiconducting and Insulating Materials, 2002. SIMC-XII-2002. 12th International Conference on
Print_ISBN :
0-7803-7418-5
Type :
conf
DOI :
10.1109/SIM.2002.1242743
Filename :
1242743
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=397450
