DocumentCode
399420
Title
Towards modular integrated sensors: the development of artificial haircell sensors using efficient fabrication methods
Author
Chen, Jack ; Fan, Zhifang ; Engel, Jonathan ; Liu, Chang
Author_Institution
Dept. of Electr. & Comput. Eng., Illinois Univ., Urbana, IL, USA
Volume
3
fYear
2003
fDate
27-31 Oct. 2003
Firstpage
2341
Abstract
We report the development of an artificial haircell (AHC) fabricated using two methods: (1) silicon bulk micromachining and (2) polymer surface micromachining. Both methods leverage efficient three dimensional assembly of microstructures. The AHC is modeled after biological hair cells, a common and versatile mechanoreceptor in biology. The design, fabrication process, along with testing results are discussed in the paper.
Keywords
mechanoception; micromachining; sensors; artificial haircell sensors; biological hair cells; biology; fabrication methods; microstructures; modular integrated sensors; polymer surface micromachining; silicon bulk micromachining; three dimensional assembly; versatile mechanoreceptor; Assembly; Biological system modeling; Biosensors; Cells (biology); Fabrication; Hair; Micromachining; Microstructure; Polymers; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Intelligent Robots and Systems, 2003. (IROS 2003). Proceedings. 2003 IEEE/RSJ International Conference on
Print_ISBN
0-7803-7860-1
Type
conf
DOI
10.1109/IROS.2003.1249220
Filename
1249220
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