DocumentCode :
399421
Title :
Fundamental studies of nanoscale sensing and actuation based on nanomanipulation and assembly
Author :
Yu, Min-Feng
Author_Institution :
Dept. of Mech. & Ind. Eng., Illinois Univ., Urbana, IL, USA
Volume :
3
fYear :
2003
fDate :
27-31 Oct. 2003
Firstpage :
2365
Abstract :
An approach based on versatile nanomanipulation and assembly has been taken to investigate the fundamental properties of nanomaterials of various types for their potential applications in sensing and actuation. A nanomanipulation system with many degrees of freedom was developed for use inside a field emission scanning electron microscope. This system is capable of nanometer resolution motion, and free-space manipulation/characterization of nanostructures by the multiple probes controlled by the high precision manipulators. Specifically, the manipulation and basic construction capabilities in free space were demonstrated with nanomaterials, such as nanotubes and nanowires having diameters around tens of nanometers and length around a few microns; mechanical and electrical characterization of such individual nanoscale objects were realized with the introduction of new techniques and methods; and finally, mechanical resonance and high order parametric resonances in a nanowire mechanical system were realized using oscillating electric field induced oscillation.
Keywords :
field emission electron microscopy; microassembling; micromanipulators; nanotechnology; nanotubes; nanowires; robotic assembly; scanning electron microscopy; assembly; electrical characterization; field emission scanning electron microscope; free-space manipulation; high precision manipulators; mechanical characterization; mechanical resonance; multiple probes; nanomanipulation; nanomaterials; nanometer resolution motion; nanoscale actuation; nanoscale sensing; nanostructures; nanotubes; nanowires; parametric resonances; Assembly; Control systems; Electron emission; Motion control; Nanomaterials; Nanostructures; Nanowires; Probes; Resonance; Scanning electron microscopy;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Intelligent Robots and Systems, 2003. (IROS 2003). Proceedings. 2003 IEEE/RSJ International Conference on
Print_ISBN :
0-7803-7860-1
Type :
conf
DOI :
10.1109/IROS.2003.1249224
Filename :
1249224
Link To Document :
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