Title :
2003 International Semiconductor Conference. CAS 2003 Proceedings (IEEE Cat. No.03TH8676)
fDate :
Sept. 28 2003-Oct. 2 2003
Abstract :
The following topics were discussed: nanoscience and nanoengineering; micromachined devices and circuits for microwave and millimeter wave applications; microoptics and microphotonics sensors and MEMS.
Keywords :
integrated optics; micro-optics; micromachining; micromechanical devices; microsensors; microwave devices; millimetre wave devices; nanotechnology; MEMS; micromachined circuits; micromachined devices; microoptics; microphotonics sensors; microwave applications; millimeter wave applications; nanoengineering; nanoscience; Integrated optics; Microelectromechanical devices; Micromachining; Microsensors; Microwave devices; Millimeter wave devices; Nanotechnology;
Conference_Titel :
Semiconductor Conference, 2003. CAS 2003. International
Conference_Location :
Sinaia, Romania
Print_ISBN :
0-7803-7821-0
DOI :
10.1109/SMICND.2003.1251333
