Modeling and design aspects of the MEMS switch

In this paper, some aspects regarding the mechanical as well as electrical modeling of the MEMS switch, are presented. A general formula for the spring constant is proposed, in order to take into consideration the real distribution of the electrostatic force along the bridge MEMS. This formula may be used for a better mechanical analysis, but also for a better electrical analysis of the MEMS switch. The influence of the value for the applied voltage on the MEMS bridge is also numerically analyzed, for two geometries of the device. Also, a numerically analysis of a switch consisting of an array of MEMS switches is also presented, in order to estimate the effect of the MEMS switch series inductance.