Title :
A "toggle switch" for RF applications - mechanical behavior simulation
Author :
Tibeica, C. ; Moagar-Poladian, V. ; Vladoianu, F. ; Vasilache, D. ; Voitincu, C.
Author_Institution :
Nat. Inst. for R&D in Microtechnologies, Bucharest, Romania
fDate :
28 Sept.-2 Oct. 2003
Abstract :
An electrostatically actuated RF switch has been proposed and simulated, in order to eliminate some inconvenient of such devices. The proposed design offers a solution for stiction effect, namely the phenomenon whereby parts of the device bonded together upon physical contact. Simulation´s results concerning the device performance including actuation voltage, mechanical contact, and residual stress effects are presented.
Keywords :
internal stresses; microswitches; microwave devices; RF applications; actuation voltage; electrostatically actuated RF switch; mechanical behavior simulation; mechanical contact; residual stress; stiction effect; toggle switch; Bonding; Contacts; Electrodes; Micromechanical devices; Radio frequency; Research and development; Residual stresses; Surface morphology; Switches; Voltage;
Conference_Titel :
Semiconductor Conference, 2003. CAS 2003. International
Print_ISBN :
0-7803-7821-0
DOI :
10.1109/SMICND.2003.1251361
