Analysis and optimization of the Bragg reflector for tunable photodetector with planar mirror optical microcavity on silicon substrate

Author

Purica, M. ; Budianu, E. ; Kusko, M. ; Dragoman, D. ; Dinescu, G.

Author_Institution

Nat. Inst. for Res. & Dev. in Microtechnologies, Bucharest, Romania

Volume

1

fYear

2003

fDate

28 Sept.-2 Oct. 2003

Abstract

An analytical model for calculating the reflection and transmission coefficients of a Bragg reflector with periodic structure is reported. Using explicit expressions for these coefficients the reflectivity of the periodic structures was simulated for different pairs of layer materials (SiO₂/Si₃N₄.poly-Si/SiO₂, Si/air-gap and SiO₂/Au) and layer thickness. Our method allows the rapid evaluation of reflectance of Bragg reflector with periodic structure.

Keywords

Bragg gratings; photodetectors; photoreflectance; Bragg reflector; Si; Si substrate; Si/air-gap; SiO₂-Au; SiO₂-Si₃N₄-Si-SiO₂; SiO₂/Au; SiO₂/Si₃N₄.poly-Si/SiO₂; analytical model; layer thickness; planar mirror optical microcavity; reflection coefficients; transmission coefficients; tunable photodetector; Air gaps; Analytical models; Microcavities; Mirrors; Optical materials; Optical reflection; Periodic structures; Photodetectors; Reflectivity; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Conference, 2003. CAS 2003. International

Print_ISBN

0-7803-7821-0

Type

conf

DOI

10.1109/SMICND.2003.1251367

Filename

1251367