Title :
Novel spatial scanning technique for surface roughness measurement
Author :
Xie, F. ; Zhang, W. ; Jiang, X.Q. ; Zhang, L. ; Bennion, I.
Author_Institution :
Sch. of Eng., Huddersfield Univ., UK
Abstract :
We present the first spatial scanning system using wavelength-spatial transformation of chromatic dispersion device. Optical probe used in fiber optic interferometer for surface measurement is demonstrated by using diffraction grating and wavelength scanning technique.
Keywords :
diffraction gratings; fibre optic sensors; optical fibre dispersion; optical scanners; surface topography measurement; chromatic dispersion device; diffraction grating; fiber optic interferometer; optical probe; spatial scanning; surface roughness measurement; wavelength scanning; Chromatic dispersion; Optical devices; Optical fibers; Optical interferometry; Optical surface waves; Probes; Rough surfaces; Surface roughness; Surface waves; Wavelength measurement;
Conference_Titel :
Lasers and Electro-Optics Society, 2003. LEOS 2003. The 16th Annual Meeting of the IEEE
Print_ISBN :
0-7803-7888-1
DOI :
10.1109/LEOS.2003.1251618
