• DocumentCode
    399924
  • Title

    Characteristics of extreme ultraviolet radiation from cryogenic rare gas targets

  • Author

    Raiyaguru, C. ; Higashiguchi, Takeshi ; Hirata, Takahiro ; Koga, Masato ; Sasaki, Wataru ; Kubodera, Shoichi

  • Author_Institution
    Dept. of Electr. & Electron. Eng., Miyazaki Univ., Japan
  • Volume
    1
  • fYear
    2003
  • fDate
    27-28 Oct. 2003
  • Firstpage
    223
  • Abstract
    EUV emission due to interaction between the nano-second laser pulse and the rare gas cryogenic targets is characterized. Cryogenic xenon target yields the maximum EUV emission among other lighter rare gas targets. Spatially integrated conversion efficiency of 0.2% per pulse could be achieved. Angular distribution of the EUV emission and ionic debris reveals that the ionic debris has the angular distribution of cos6θ, which is much sharper than the EUV distribution of cos2θ.
  • Keywords
    high-speed optical techniques; plasma diagnostics; plasma production by laser; plasma sources; ultraviolet sources; EUV emission; cryogenic rare gas targets; cryogenic xenon target; extreme ultraviolet radiation; nanosecond laser pulse; Cryogenics; Gas lasers; Nanobioscience; Optical pulses; Photonics; Plasma measurements; Plasma x-ray sources; Ultraviolet sources; X-ray imaging; Xenon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics Society, 2003. LEOS 2003. The 16th Annual Meeting of the IEEE
  • ISSN
    1092-8081
  • Print_ISBN
    0-7803-7888-1
  • Type

    conf

  • DOI
    10.1109/LEOS.2003.1251716
  • Filename
    1251716