Title :
MEMS technology for optical interconnects
Author_Institution :
Jacobs Sch. of Eng., Electr. & Comput. Eng., California Univ., La Jolla, CA, USA
Abstract :
This study discusses MEMS technology including design, modeling, and fabrication facilities, along with a diverse set of optical MEMS devices. This device technology is available for any application, but is particularly well suited for optical (data) interconnection in telecommunications.
Keywords :
micro-optics; micromechanical devices; optical communication equipment; optical design techniques; optical fabrication; optical interconnections; MEMS design; MEMS fabrication facilities; MEMS modeling; MEMS technology; optical MEMS devices; optical interconnection; optical interconnects; Microelectromechanical devices; Micromechanical devices; Optical attenuators; Optical devices; Optical fiber networks; Optical filters; Optical interconnections; Optical modulation; Optical sensors; Optical waveguides;
Conference_Titel :
Lasers and Electro-Optics Society, 2003. LEOS 2003. The 16th Annual Meeting of the IEEE
Print_ISBN :
0-7803-7888-1
DOI :
10.1109/LEOS.2003.1251756
