Title :
Study of membrane supported RF MEMS resistive switches using electromagnetical simulation
Author :
Vladoianu, F. ; Vasilache, D. ; Enachescu, R. ; Dragan, I. ; Iordache, M. ; Muller, A.
Author_Institution :
Nat. Inst. for R&D in Microtechnologies, Bucharest, Romania
fDate :
28 Sept.-2 Oct. 2003
Abstract :
We present a wide band analysis of two types of resistive switches: series and parallel. In order to improve the RF parameters we have reduced the thickness of the substrate and placed the switches on different types of membranes.
Keywords :
microswitches; semiconductor device models; electromagnetical simulation; membrane supported RF MEMS resistive switches; wide band analysis; Biomembranes; Conductors; Contacts; Dielectric substrates; Energy consumption; Micromechanical devices; Parasitic capacitance; Power semiconductor switches; Radio frequency; Radiofrequency microelectromechanical systems;
Conference_Titel :
Semiconductor Conference, 2003. CAS 2003. International
Print_ISBN :
0-7803-7821-0
DOI :
10.1109/SMICND.2003.1252424
