Title :
Novel integrated optical displacement sensor for scanning force microscopies
Author :
Aydinli, Atilla ; Kiyat, Isa ; Kocabas, Coskun
Author_Institution :
Dept. of Phys., Bilkent Univ., Ankara, Turkey
Abstract :
A novel displacement sensor for scanning force microscopies using an integrated optical micro-ring resonator is described. Device operates by monitoring the changes in transmission spectrum of micro-ring resonator. This design provides sensitivities about ∼10-4 Å-1.
Keywords :
atomic force microscopy; infrared spectra; integrated optics; micro-optics; optical resonators; optical sensors; optical waveguides; integrated optical displacement sensor; integrated optical micro-ring resonator; scanning force microscopy; transmission spectrum; Force sensors; Integrated optics; Optical microscopy; Optical refraction; Optical resonators; Optical ring resonators; Optical sensors; Optical variables control; Optical waveguides; Stress;
Conference_Titel :
Lasers and Electro-Optics Society, 2003. LEOS 2003. The 16th Annual Meeting of the IEEE
Print_ISBN :
0-7803-7888-1
DOI :
10.1109/LEOS.2003.1252901
