DocumentCode :
400403
Title :
Polarization properties of fully metal coated scanning near-field optical microscopy probes
Author :
Vaccaro, L. ; Aeschimann, L. ; Nakagawa, W. ; Eckert, R. ; Heinzelmann, H. ; Akiyama, T. ; Staufer, U. ; de Rooij, N.F. ; Herzig, H.P.
Author_Institution :
Inst. of Microtechnol., Neuchatel Univ., Switzerland
Volume :
2
fYear :
2003
fDate :
27-28 Oct. 2003
Firstpage :
969
Abstract :
We have presented a design of silicon cantilever based scanning near-field optical microscopy (SNOM) probes with aluminum coated quartz tips which have been batch fabricated using micromachining technology. The 12 μm high probe tips are made of SiO2 and fabricated at the end of silicon cantilevers. A hole in the cantilever, located underneath the tip base, permits light insertion and collection through the cantilever. Transmission electron microscopy reveals a 60 nm thick polycrystalline aluminum layer that covers the tip entirely. Still, far-field measurements show the typical polarization properties of conventional SNOM aperture probes. In order to study the mechanism of light transmission through such a tip, theoretical modelling and several experiments were performed.
Keywords :
aluminium; elemental semiconductors; light polarisation; light transmission; micromachining; near-field scanning optical microscopy; optical design techniques; optical fabrication; optical films; optical materials; quartz; silicon; silicon compounds; transmission electron microscopy; 12 micron; 60 nm; Al; Si; SiO2; aluminum coated quartz tip; batch fabrication; far-field measurement; light insertion; light transmission; metal coated scanning near-field optical microscopy probe; micromachining technology; polarization property; polycrystalline aluminum layer; silicon cantilever; theoretical modelling; transmission electron microscopy; Aluminum; Electromagnetic fields; Electromagnetic wave polarization; Image resolution; Optical microscopy; Optical polarization; Optical propagation; Probes; Silicon; Transmission electron microscopy;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Lasers and Electro-Optics Society, 2003. LEOS 2003. The 16th Annual Meeting of the IEEE
ISSN :
1092-8081
Print_ISBN :
0-7803-7888-1
Type :
conf
DOI :
10.1109/LEOS.2003.1253129
Filename :
1253129
Link To Document :
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