ENCOTION - A new simulation tool for energetic contamination analysis

Experience shows that in spite of mass separation, undesired ions originating from the source chamber can be implanted energetically into a wafer. Charge exchange events and dissociation of molecular ions prior to mass analysis are the main reasons why contaminants are able to fulfill the magnetic rigidity requirements for transmission. The software tool, ENCOTION (ENergetic COntamination simulaTION) simulates the potential transport mechanisms that allow undesired ions to pass through the analyzer magnet. ENCOTION is used to evaluate the contamination potential of any element and to identify transport mechanisms of contaminants in combination with experimentally determined contamination profiles. In this paper, ENCOTION is discussed in detail and its application is demonstrated in an example.