DocumentCode
400878
Title
Construction and performance of a bench-top mapping positron alpha tool
Author
Coleman, P.G. ; Burrows, C.P. ; Knights, Andrew P. ; Sealy, B.J. ; Gwilliam, R.M.
fYear
2002
fDate
27-27 Sept. 2002
Firstpage
342
Lastpage
345
Abstract
A compact, user-friendly positron beam annihilation spectrometer has been designed and constructed. Design features, performance and first results are presented and discussed. Possible applications are described, including ion dosimetry and mapping, SIMOX process control, void monitoring and thin film interrogation.
Keywords
SIMOX; dosimetry; particle spectrometers; positron annihilation; positron sources; voids (solid); PAS; SIMOX process control; bench-top mapping positron alpha tool; defects; ion dosimetry; ion mapping; positron annihilation spectroscopy; positron beam annihilation spectrometer; radioactive primary positron source; thin film interrogation; vacancies; void monitoring; Dosimetry; Electron traps; Instruments; Laboratories; Physics; Positrons; Semiconductor films; Semiconductor thin films; Spectroscopy; Structural beams;
fLanguage
English
Publisher
ieee
Conference_Titel
Ion Implantation Technology. 2002. Proceedings of the 14th International Conference on
Conference_Location
Taos, New Mexico, USA
Print_ISBN
0-7803-7155-0
Type
conf
DOI
10.1109/IIT.2002.1258010
Filename
1258010
Link To Document