Title :
Construction and performance of a bench-top mapping positron alpha tool
Author :
Coleman, P.G. ; Burrows, C.P. ; Knights, Andrew P. ; Sealy, B.J. ; Gwilliam, R.M.
Abstract :
A compact, user-friendly positron beam annihilation spectrometer has been designed and constructed. Design features, performance and first results are presented and discussed. Possible applications are described, including ion dosimetry and mapping, SIMOX process control, void monitoring and thin film interrogation.
Keywords :
SIMOX; dosimetry; particle spectrometers; positron annihilation; positron sources; voids (solid); PAS; SIMOX process control; bench-top mapping positron alpha tool; defects; ion dosimetry; ion mapping; positron annihilation spectroscopy; positron beam annihilation spectrometer; radioactive primary positron source; thin film interrogation; vacancies; void monitoring; Dosimetry; Electron traps; Instruments; Laboratories; Physics; Positrons; Semiconductor films; Semiconductor thin films; Spectroscopy; Structural beams;
Conference_Titel :
Ion Implantation Technology. 2002. Proceedings of the 14th International Conference on
Conference_Location :
Taos, New Mexico, USA
Print_ISBN :
0-7803-7155-0
DOI :
10.1109/IIT.2002.1258010
