Title :
In-line/in-situ doping monitoring facility using ion beams at Alabama A&M University
Author :
Muntele, C.I. ; Muntele, I.C. ; Ila, D. ; Holland, L.R. ; Zimmerman, R.L. ; Nisen, D. ; Schilloff, M.
Abstract :
Here we present the design and features of the project of upgrading the existing ion beam facilities available at the Center for Irradiation of Materials of Alabama A&M University (CIM-AAMU). We intend to join the zero degrees output of the ion accelerator with the low energy output of the ion implanter in a common chamber. When finalized, the facility will allow in-line/in-situ sample modification and characterization.
Keywords :
Rutherford backscattering; atomic absorption spectroscopy; channelling; ion accelerators; ion implantation; ion microprobe analysis; spectrophotometry; tandem accelerators; vacuum pumps; Pelletron accelerator; Rutherford backscattering spectroscopy; UV-visible optical absorption spectrophotometry; channeling; common chamber; in-line in-situ doping monitoring facility; ion accelerator; ion beam facilities; low energy ion implantation; low energy output; nuclear reaction analysis; particle-induced gamma-ray emission; residual gas analyzer; sample modification; scintillating detector; tandem accelerator; turbomolecular pumps; upgrading project; zero degrees output; Doping; Elementary particle vacuum; Instruments; Ion accelerators; Ion beams; Ion implantation; Monitoring; National electric code; Spectroscopy; Vacuum systems;
Conference_Titel :
Ion Implantation Technology. 2002. Proceedings of the 14th International Conference on
Conference_Location :
Taos, New Mexico, USA
Print_ISBN :
0-7803-7155-0
DOI :
10.1109/IIT.2002.1258014
