• DocumentCode
    400921
  • Title

    Improvements to the ease of LINAC Dataset generation for high energy

  • Author

    Halling, A.M. ; Murphy, John ; Nitodas, S.F.

  • fYear
    2002
  • fDate
    27-27 Sept. 2002
  • Firstpage
    519
  • Lastpage
    521
  • Abstract
    High-energy ion implanters using RF acceleration have advantages over electrostatic implementations. However, in order to generate quality beams each successive RF resonator phase and amplitude must be adjusted to accept beam from the preceding resonator and accelerate it in a manner that produces the desired acceleration. A new method of obtaining optimal beam tuning is described. Test results are shown documenting that optimum beam performance can be achieved with minimal tuning times.
  • Keywords
    ion accelerators; ion implantation; linear accelerators; semiconductor doping; LINAC Dataset generation for high energy; RF acceleration; amplitude; electrostatic implementations; high-energy ion implanters; optimal beam tuning; successive RF resonator phase; Acceleration; Electrostatics; Helium; Linear accelerators; Linear particle accelerator; Magnetic analysis; Magnetic separation; Particle beams; Radio frequency; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ion Implantation Technology. 2002. Proceedings of the 14th International Conference on
  • Conference_Location
    Taos, New Mexico, USA
  • Print_ISBN
    0-7803-7155-0
  • Type

    conf

  • DOI
    10.1109/IIT.2002.1258056
  • Filename
    1258056