DocumentCode :
402088
Title :
On-chip testing of embedded transducers
Author :
Mir, S. ; Rufer, L. ; Courtois, B.
Author_Institution :
TIMA Lab., Grenoble, France
fYear :
2004
fDate :
2004
Firstpage :
463
Lastpage :
472
Abstract :
System-on-Chip (SoC) technologies are evolving towards the integration of highly heterogeneous devices, including hardware of a different nature, such as digital, analogue and mixed-signal, together with software components. Embedding transducers, as predicted by technology roadmaps, is yet another step in this continuous search for higher levels of integration and miniaturisation. Embedded transducers fabricated with Silicon/CMOS compatible technologies may have a lower performance than transducers fabricated with fully dedicated technologies. However, they offer the Industry the possibility of providing low cost applications for very large market niches, while still keeping the required transducer sensitivity. This is the case, for example, for accelerometers or CMOS imagery. Test technology for SoC devices is rapidly maturing. Yet many difficulties still remain, in particular for addressing the test of analogue and mixed-signal parts. Embedded transducers can be seen as analogue components. But given the fact that they work with signals other than electrical, the test of these parts is even harder to study. In this paper, we will present our work in the field of MEMS testing and its evolution towards transducer on-chip testing.
Keywords :
automatic testing; integrated circuit testing; micromechanical devices; system-on-chip; transducers; CMOS compatible technologies; MEMS testing; SOC devices; accelerometers; analogue signal; complementary metal oxide semiconductor; digital signal; embedded transducers; heterogeneous devices; microelectromechanical system testing; mixed signal; silicon compatible technologies; software components; system on chip devices; transducer on-chip testing; transducer sensitivity; Accelerometers; CMOS image sensors; CMOS technology; Costs; Hardware; Micromechanical devices; Silicon; System-on-a-chip; Testing; Transducers;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
VLSI Design, 2004. Proceedings. 17th International Conference on
Print_ISBN :
0-7695-2072-3
Type :
conf
DOI :
10.1109/ICVD.2004.1260965
Filename :
1260965
Link To Document :
بازگشت