Title :
Feedback amplifier based on an embedded HEMT in thin-film multilayer MCM-D technology
Author :
Vandersmissen, Raf ; Schreurs, Dominique ; Carchon, Geert ; Borghs, Gustaaf
Author_Institution :
IMEC, Leuven, Belgium
Abstract :
In this paper a feedback amplifier circuit integrated in MCM-D (MultiChip Module with Deposited thin films) on glass technology is presented. The active device of the amplifier is a thin-film Ge (germanium) -based HEMT. The HEMT is embedded in the bottom dielectric layer of the MCM-D. The combination of passive MCM-D technology and HEMTs on Ge allows for efficient semimonolithic integration of active devices and realization of MCMs with embedded passive and active components for amplifier circuits.
Keywords :
HEMT integrated circuits; MMIC amplifiers; elemental semiconductors; feedback amplifiers; field effect MMIC; germanium; multichip modules; Ge; MCM-D on glass technology; bottom dielectric layer; embedded HEMT; embedded active components; embedded passive components; feedback amplifier circuit; integrated spiral inductors; semimonolithic integration; thin-film multilayer MCM-D technology; Dielectric thin films; Feedback amplifiers; Feedback circuits; HEMTs; Integrated circuit technology; Multichip modules; Nonhomogeneous media; Sputtering; Thin film circuits; Transistors;
Conference_Titel :
Microwave Conference, 2003. 33rd European
Print_ISBN :
1-58053-834-7
DOI :
10.1109/EUMC.2003.1262278
