Title :
Measurement of the sheet resistance of thin metallic films at 130GHz
Author :
Lee, M.H.J. ; Collier, R.J.
Author_Institution :
Microelectron. Res. Centre, Cavendish Lab., UK
Abstract :
The sheet resistance of thin metallic films has been measured using a transmission technique at 130 GHz. This technique can be used for a range of sheet resistances from a few kilohms down to a few ohms. The microwave results are higher than the corresponding values measured at 0 Hz. For sheet resistances less than a few ohms, the measurement range has been extended downwards using patterned metallic films.
Keywords :
electric resistance measurement; electromagnetic wave transmission; metallic thin films; microwave measurement; millimetre wave measurement; 130 GHz; Nichrome films; characteristic impedance; patterned metallic films; sheet resistance measurement; stripes; thin metallic films; transmission coefficient; transmission loss; Conductivity; Dielectric constant; Dielectric measurements; Dielectric substrates; Dielectric thin films; Electrical resistance measurement; Equations; Frequency measurement; Microwave measurements; Skin;
Conference_Titel :
Microwave Conference, 2003. 33rd European
Print_ISBN :
1-58053-834-7
DOI :
10.1109/EUMC.2003.1262327
