Ellipsometry for measurement of complex dielectric permittivity in millimeter-wave region

Author

Tsuzukiyama, K. ; Sakai, Taiji ; Yamazaki, Takaaki ; Hashimoto, Osamu

Author_Institution

Mitsui Chemicals, INC, Nagaura, Japan

Volume

1

fYear

2003

fDate

7-9 Oct. 2003

Firstpage

487

Abstract

The ellipsometry method is extended to a measurement for complex permittivities; of materials in millimeter-wave region. We propose an effective technique based on the Fourier analysis method to eliminate an uncertainty due to the free-space method. Complex permittivities can be measured with a high degree of accuracy by the improved ellipsometry method, as named Fourier Analysis Correction Ellipsometry (FACE) Method.

Keywords

Fourier analysis; ellipsometry; measurement uncertainty; millimetre wave measurement; permittivity measurement; Fourier analysis method; Newton method; complex permittivity measurement; complex reflection coefficients; correction ellipsometry method; electromagnetic wave absorbers; ellipsometry method; free-space method; ideal Fourier coefficients; lossy materials; millimeter-wave region; optimum incident angle; polypropylene sheets; uncertainty; Detectors; Dielectric measurements; Electromagnetic measurements; Electromagnetic wave polarization; Ellipsometry; Frequency; Millimeter wave measurements; Millimeter wave technology; Optical polarization; Permittivity measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Conference, 2003. 33rd European

Print_ISBN

1-58053-834-7

Type

conf

DOI

10.1109/EUMC.2003.1262331

Filename

1262331