Title :
Ellipsometry for measurement of complex dielectric permittivity in millimeter-wave region
Author :
Tsuzukiyama, K. ; Sakai, Taiji ; Yamazaki, Takaaki ; Hashimoto, Osamu
Author_Institution :
Mitsui Chemicals, INC, Nagaura, Japan
Abstract :
The ellipsometry method is extended to a measurement for complex permittivities; of materials in millimeter-wave region. We propose an effective technique based on the Fourier analysis method to eliminate an uncertainty due to the free-space method. Complex permittivities can be measured with a high degree of accuracy by the improved ellipsometry method, as named Fourier Analysis Correction Ellipsometry (FACE) Method.
Keywords :
Fourier analysis; ellipsometry; measurement uncertainty; millimetre wave measurement; permittivity measurement; Fourier analysis method; Newton method; complex permittivity measurement; complex reflection coefficients; correction ellipsometry method; electromagnetic wave absorbers; ellipsometry method; free-space method; ideal Fourier coefficients; lossy materials; millimeter-wave region; optimum incident angle; polypropylene sheets; uncertainty; Detectors; Dielectric measurements; Electromagnetic measurements; Electromagnetic wave polarization; Ellipsometry; Frequency; Millimeter wave measurements; Millimeter wave technology; Optical polarization; Permittivity measurement;
Conference_Titel :
Microwave Conference, 2003. 33rd European
Print_ISBN :
1-58053-834-7
DOI :
10.1109/EUMC.2003.1262331