Applications of MEMS technology to RF/microwave systems

Author

De Los Santos, Hector J.

Author_Institution

NanoMEMS Res., Irvine, CA, USA

Volume

3

fYear

2003

fDate

7-9 Oct. 2003

Firstpage

1439

Abstract

Microelectromechanical Systems (MEMS) applications in RF and microwave electronics are on the verge of revolutionizing wireless communications. We discuss the fundamentals of this exciting technology, potential pitfalls to be encountered and typical applications where MEMS is expected to make the greatest impact in RF/microwave circuits and systems. In particular, the ability of MEMS´ fabrication techniques to enhance the performance of passive components, e.g., capacitors, inductors, transmission lines, and switches, is addressed, and a number of potential wireless system opportunities, namely, wireless transceivers, routing networks, and tracking antennas for mobile multimedia communications, awaiting the maturation of MEMS, are discussed.

Keywords

capacitors; inductors; integrated circuit design; integrated circuit modelling; microswitches; microwave antennas; microwave integrated circuits; microwave switches; multimedia communication; telecommunication network routing; transceivers; MEMS technology; RF electronics; RF/microwave circuits; RF/microwave systems; capacitors; inductors; microelectromechanical systems; microwave electronics; mobile multimedia communications; passive components; potential wireless system; routing networks; switches; tracking antennas; transmission lines; wireless communications; wireless transceivers; Circuits and systems; Distributed parameter circuits; Fabrication; Inductors; Microelectromechanical systems; Micromechanical devices; Microwave technology; Radio frequency; Switched capacitor networks; Wireless communication;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Conference, 2003. 33rd European

Print_ISBN

1-58053-834-7

Type

conf

DOI

10.1109/EUMC.2003.1262930

Filename

1262930