Title :
High Q switchable planar resonator loaded with a MEMS digital capacitance
Author :
Pothier, A. ; Blondy, P. ; Cros, D. ; Verdeyme, S. ; Guillon, P. ; Orlianges, J.C. ; Champeaux, C. ; Catherinot, A.
Author_Institution :
IRCOM, Limoges, France
Abstract :
This paper focuses on the design of a digital MEMS capacitive network and its application on tunable circuit. A high Q resonator is designed and realized. Then, this resonator is loaded with a 3 bits capacitive network to provide a digital tuning in frequency. The used MEMS micro relays performances permit to realize a high Q resonator which exhibits a 6.3GHz tuning from 16.6GHz when all bits are off to 10.3GHz when all bits are on. This approach resulted in good performance with a predicted quality factor higher than 120 for all the combinations.
Keywords :
Q-factor; capacitance; circuit tuning; micromechanical resonators; microrelays; 10.3 GHz; 16.6 GHz; 6.3 GHz; MEMS digital capacitance; MEMS microrelays; capacitive network; digital MEMS; digital tuning; high Q resonator; high Q switchable planar resonator; tunable circuit; Circuit optimization; Equations; Frequency; Micromechanical devices; Microswitches; Parasitic capacitance; Q factor; Switches; Tunable circuits and devices; Tuning;
Conference_Titel :
Microwave Conference, 2003. 33rd European
Print_ISBN :
1-58053-834-7
DOI :
10.1109/EUMC.2003.1262981
