Title :
Coupling issues in strongly confined nanophotonic waveguides
Author :
Baets, R. ; Bienstman, P. ; Bogaerts, W. ; Taillaert, D. ; Luyssaert, B.
Author_Institution :
IMEC, Univ. Gent, Belgium
fDate :
29 June-3 July 2003
Abstract :
We present several devices to couple light efficiently into strongly confined nanophotonic waveguides (surface fibre coupler, compact spot-size converter). These devices are fabricated in SOI using deep-UV lithography.
Keywords :
nanotechnology; optical couplers; optical fabrication; optical fibre couplers; optical waveguides; photonic crystals; silicon-on-insulator; ultraviolet lithography; SOI; Si-SiO2; compact spot-size converter; coupling; deep-UV lithography; strongly confined nanophotonic waveguides; surface fibre coupler; Gratings; Lithography; Optical coupling; Optical device fabrication; Optical fiber couplers; Optical fiber devices; Optical fiber polarization; Optical waveguides; Photonic crystals; Surface waves;
Conference_Titel :
Transparent Optical Networks, 2003. Proceedings of 2003 5th International Conference on
Print_ISBN :
0-7803-7816-4
DOI :
10.1109/ICTON.2003.1264613
