Integrated Transformers With Sputtered Laminated Magnetic Core

Author

Mullenix, Joyce ; El-Ghazaly, A. ; Wang, Shan X.

Author_Institution

Electr. Eng. Dept., Stanford Univ., Stanford, CA, USA

Volume

49

Issue

7

fYear

2013

fDate

Jul-13

Firstpage

4021

Lastpage

4027

Abstract

Integrated interleaved solenoid transformers with a single layer of laminated magnetic core have been designed and fabricated. A coupling coefficient of > 0.97 was achieved for a device with a primary and secondary inductance of 565 nH, which represents an enhancement of more than 60 times that of air core inductors of identical geometry. By using the laminated magnetic core structure, the quality factor of the primary or secondary inductance was increased to a peak value of 6.3 with 3 μm thick electroplated copper coils. Measured characteristics of the integrated transformers agree very well with simulation results for values of self-resonant frequency, inductance, quality factor, and coupling coefficient.

Keywords

Permalloy; Q-factor; electroplating; inductance; laminations; solenoids; sputtered coatings; transformer cores; transformers; Ni₈₁Fe₁₉; air core inductors; coupling coefficient; electroplated copper coils; integrated interleaved solenoid transformers; integrated transformers; laminated magnetic core; primary inductance; quality factor; secondary inductance; self-resonant frequency; single layer; size 3 mum; sputtering; Coils; Couplings; Inductance; Magnetic domains; Permeability; Transformer cores; NiFe; high frequency; integrated transformer; laminated core;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/TMAG.2013.2242865

Filename

6559127