Title :
Bi-directional differential actuator with two degree-of-freedom
Author :
Hsiao-wen, Lee ; Shih-yi, Wen ; Wu-zheng, Guo
Author_Institution :
Opto-Electron. & Syst. Lab., Ind. Technol. Res. Inst., Chutung, Taiwan
Abstract :
A novel bi-directional differential actuator with in-plane and out-of-plane two degrees of freedom is demonstrated. The design of the actuator utilizes four-suspension-arm differential structure and differential driving. Out-of-plane deflection as high as 10 μm is achieved with 7-V drive.
Keywords :
microactuators; optical design techniques; bidirectional differential actuator; degree-of-freedom; differential driving; four-suspension-arm differential structure; in-plane; out-of-plane; Actuators; Bidirectional control;
Conference_Titel :
Lasers and Electro-Optics, 2003. CLEO/Pacific Rim 2003. The 5th Pacific Rim Conference on
Print_ISBN :
0-7803-7766-4
DOI :
10.1109/CLEOPR.2003.1274569
