Title :
Out-of-plane MEMS shutter with continuous motion capability for VOA application
Author :
Lai, Yen-Jyh ; Wu, Chia-Yu ; Lee, Chengkuo ; Lin, Yu-Shen ; Chen, Wen-Chih ; Chen, Chihchung ; Tsai, Ming-Hung ; Huang, Ruey-Shing ; Lin, Min-Shyong
Author_Institution :
Asia Pacific Microsyst. Inc., Hsinchu, Taiwan
Abstract :
A new MEMS VOA with continuous motion was developed. The self-assembly mechanism was achieved by means of "extra" residual beam. We demonstrated that the optical performance had 70dB attenuation range and less than 1 dB insertion loss for this device.
Keywords :
micro-optics; micromechanical devices; optical elements; optical losses; self-assembly; 70 dB; MEMS VOA; continuous motion capability; insertion loss; optical performance; out-of-plane MEMS shutter; residual beam; self-assembly mechanism; Asia; Attenuation; Insertion loss; Micromechanical devices; Optical attenuators; Optical devices; Optical losses; Research and development; Springs; Voltage;
Conference_Titel :
Lasers and Electro-Optics, 2003. CLEO/Pacific Rim 2003. The 5th Pacific Rim Conference on
Print_ISBN :
0-7803-7766-4
DOI :
10.1109/CLEOPR.2003.1274605
