DocumentCode
405377
Title
Low voltage and pull-in state adjustable dual-servo-scanning-mirror
Author
Wang, Kenvin ; Sinclair, Mike ; Böhringer, Karl F.
Author_Institution
Washington Univ., Seattle, WA, USA
Volume
1
fYear
2003
fDate
15-19 Dec. 2003
Abstract
This paper reports a new dual-servo-scanning mirror, which makes use of thermal and electrostatic driving principles. By tuning loading of the thermal and electrostatic actuator individually, one can increase the tilting-angle of the mirror.
Keywords
electrostatic actuators; micromirrors; optical tuning; servomechanisms; thermo-optical effects; electrostatic actuator tuning loading; electrostatic driving principles; low voltage dual-servo-scanning-mirror tilting-angle; pull-in state adjustable dual-servo-scanning-mirror; thermal actuator tuning loading; Displays; Electrostatic actuators; Low voltage; Micromechanical devices; Micromirrors; Mirrors; Optical films; Sensor arrays; Springs; Thermal force;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2003. CLEO/Pacific Rim 2003. The 5th Pacific Rim Conference on
Print_ISBN
0-7803-7766-4
Type
conf
DOI
10.1109/CLEOPR.2003.1274606
Filename
1274606
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