Title :
Enhancement of proton-implanted GaAs VCSEL performance by transparent overcoating
Author :
Lai, Fang-I ; Laih, L.H. ; Chang, Y.S. ; Shei, T.H. ; Kuo, H.C. ; Wang, S.C.
Author_Institution :
Inst. of Electro-Opt. Eng., Nat. Chiao Tung Univ., Hsinchu, Taiwan
Abstract :
Deposition of thin metal film and ITO as transparent overcoating on proton-implanted GaAs VCSEL increases the laser output power by two-fold and the slope efficiency by five-fold, and also improves the kinks in L-I characteristics.
Keywords :
III-V semiconductors; antireflection coatings; gallium arsenide; indium compounds; ion exchange; laser variables measurement; optical films; surface emitting lasers; GaAs; ITO; InSnO; L-I characteristics; VCSEL; kinks; proton-implanted GaAs; thin metal film deposition; transparent overcoating; Annealing; Apertures; Fiber lasers; Gallium arsenide; Indium tin oxide; Ohmic contacts; Power generation; Surface emitting lasers; Temperature; Vertical cavity surface emitting lasers;
Conference_Titel :
Lasers and Electro-Optics, 2003. CLEO/Pacific Rim 2003. The 5th Pacific Rim Conference on
Print_ISBN :
0-7803-7766-4
DOI :
10.1109/CLEOPR.2003.1274686
