DocumentCode
405448
Title
Enhancement of proton-implanted GaAs VCSEL performance by transparent overcoating
Author
Lai, Fang-I ; Laih, L.H. ; Chang, Y.S. ; Shei, T.H. ; Kuo, H.C. ; Wang, S.C.
Author_Institution
Inst. of Electro-Opt. Eng., Nat. Chiao Tung Univ., Hsinchu, Taiwan
Volume
1
fYear
2003
fDate
15-19 Dec. 2003
Abstract
Deposition of thin metal film and ITO as transparent overcoating on proton-implanted GaAs VCSEL increases the laser output power by two-fold and the slope efficiency by five-fold, and also improves the kinks in L-I characteristics.
Keywords
III-V semiconductors; antireflection coatings; gallium arsenide; indium compounds; ion exchange; laser variables measurement; optical films; surface emitting lasers; GaAs; ITO; InSnO; L-I characteristics; VCSEL; kinks; proton-implanted GaAs; thin metal film deposition; transparent overcoating; Annealing; Apertures; Fiber lasers; Gallium arsenide; Indium tin oxide; Ohmic contacts; Power generation; Surface emitting lasers; Temperature; Vertical cavity surface emitting lasers;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2003. CLEO/Pacific Rim 2003. The 5th Pacific Rim Conference on
Print_ISBN
0-7803-7766-4
Type
conf
DOI
10.1109/CLEOPR.2003.1274686
Filename
1274686
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