Title :
Interferometric differential phase ellipsometer
Author :
Chou, Chien ; Ten, Hui-Kang
Author_Institution :
Inst. of Radiol. Sci., Nat. Yang-Ming Univ., Taipei, Taiwan
Abstract :
We present a differential phase detection scheme which incorporates a common-path optical heterodyne interferometer to measure the ellipsometric parameters in near real time.
Keywords :
ellipsometers; heterodyne detection; light interferometers; phase detectors; common-path optical heterodyne interferometer; differential phase detection; differential phase ellipsometer; ellipsometric parameters; interferometric ellipsometer; near real time measurements; Decoding; Ellipsometry; Instruments; Optical films; Optical interferometry; Optical mixing; Optical polarization; Optical refraction; Phase detection; Phase measurement;
Conference_Titel :
Lasers and Electro-Optics, 2003. CLEO/Pacific Rim 2003. The 5th Pacific Rim Conference on
Print_ISBN :
0-7803-7766-4
DOI :
10.1109/CLEOPR.2003.1277012
