Title :
Fabrication of LiNbO3 thin film by pulsed laser deposition and estimation of nonlinear property
Author :
Gunji, Soichiro ; Shimizu, Youhei ; Nakata, Yoshiki ; Okada, Tatsuo ; Mae, Mitsuo
Author_Institution :
Graduate Sch. of ISEE, Kyushu Univ., Fukuoka, Japan
Abstract :
LiNbO3 thin films were deposited by pulsed-laser deposition (PLD) method. Crystalline and transparent films were deposited on sapphire substrate at 400 °C and in 100 mTorr of oxygen gas pressure. The nonlinear property was measured by SHG experiment.
Keywords :
ferroelectric thin films; lithium compounds; optical films; optical harmonic generation; pulsed laser deposition; 100 mtorr; 400 degC; Al2O3; LiNbO3 thin film; LiNbO3; PLD; SHG experiment; nonlinear property; oxygen gas pressure; pulsed laser deposition; Crystallization; Educational institutions; Gas lasers; Optical device fabrication; Optical pulses; Optical waveguides; Pulsed laser deposition; Sputtering; Substrates; Transistors;
Conference_Titel :
Lasers and Electro-Optics, 2003. CLEO/Pacific Rim 2003. The 5th Pacific Rim Conference on
Print_ISBN :
0-7803-7766-4
DOI :
10.1109/CLEOPR.2003.1277212
