Title :
Towards optical fluorescence sensing using multimode interference splitters
Author :
Cleary, Alison ; Garcia-Blanco, Sonia ; Glidle, Andrew ; Aitchison, J. Stewart ; Laybourn, Peter ; Cooper, Jonathan M.
Author_Institution :
Dept. of Electron., Glasgow Univ., Scotland, UK
Abstract :
One to N MMI splitters suitable for use in optical sensors have been fabricated using electron beam irradiation of germanium doped flame hydrolysis deposited (FHD) silica (a technique that we have previously used for producing waveguides) (Garcia-Blanco et al., 2001). The splitters have been integrated with microfluidic chambers to form a direct-excitation fluorescence sensor chip for use at visible wavelengths.
Keywords :
electron beam effects; fluorescence; germanium; integrated optics; laser materials processing; light interference; optical arrays; optical fabrication; optical sensors; direct-excitation; electron beam irradiation; fluorescence sensor chip; germanium-doped flame hydrolysis deposited silica; microfluidic chambers; multimode interference splitters; optical fluorescence sensing; optical sensors; silica-on-silicon; visible wavelengths; Electron beams; Electron optics; Fires; Fluorescence; Germanium; Interference; Microfluidics; Optical sensors; Optical waveguides; Silicon compounds;
Conference_Titel :
Sensors, 2003. Proceedings of IEEE
Print_ISBN :
0-7803-8133-5
DOI :
10.1109/ICSENS.2003.1278942
