A MEMS-based vortex flow sensor for aggressive media

Author

Pedersen, Nicholas ; Andersen, Per E.

Author_Institution

Grundfos Manage. A/S, Bjerringbro, Denmark

Volume

1

fYear

2003

fDate

22-24 Oct. 2003

Firstpage

320

Abstract

We report for the first time a MEMS-based multi-function flow sensor for aggressive media based on the vortex shedding principle. The flow sensor operates by detecting the frequency of the periodic pressure variations that are induced when fluid in a pipe passes a bluff body. The sensor is a compact, low-cost combined flow and temperature sensor which is suitable for use in chemically harsh environments due to a corrosion-resistant coating allowing direct exposure of the piezo-resistive pressure sensor chip to aggressive media. It is demonstrated that the flow sensor enables accurate flow and temperature measurement over a wide dynamic range that also covers very low flow rates.

Keywords

flowmeters; microsensors; pipe flow; pressure measurement; pressure sensors; vortices; MEMS-based vortex flow sensor; aggressive media; corrosion-resistant coating; fluid flow; periodic pressure variations; piezo-resistive pressure sensor; pipe; vortex shedding; Biomembranes; Chemical sensors; Coatings; Fluid flow measurement; Frequency; Pressure measurement; Printed circuits; Sensor phenomena and characterization; Temperature sensors; Viscosity;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2003. Proceedings of IEEE

Print_ISBN

0-7803-8133-5

Type

conf

DOI

10.1109/ICSENS.2003.1278950

Filename

1278950